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cf4 Maintance Draeger

CROSS-REFERENCES TO RELATED APPLICATIONS. This application is a continuation of U.S. patent application Ser. No. 13/279,998 by Zhang et al., filed Oct. 24, 2011 and titled "DRY-ETCH FOR SILICON-AND-CARBON-CONTAINING FILMS," which claims the benefit of U.S. Provisional Application No. 61/513,892 by Zhang et al., filed Aug. 1, 2011 and titled "DRY-ETCH FOR SILICON-AND-CARBON

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